The updated we used to post here now are going directly to MIT.nano's site (so that we're retiring this blog). You can check at http://mitnano.mit.edu/facility-updates
Fab Blog
Sat, 09/14/2019
The AJA sputter tool will be moved over to MIT.nano in about two weeks time. Work on the utilities has...
Fri, 09/13/2019
If you stand outside the 3rd floor cleanroom, you'll be looking through these windows. Below, work is ongoing to install...
Wed, 09/11/2019
Construction for the ALD has been completed, and it's been handed over to nano staff for startup and re-qualification over the...
Thu, 09/05/2019
The table-top SEM was moved in and positioned, waiting for the pump and exhaust to be connected.
Sun, 08/25/2019
We are renaming tools as they move into MIT.nano, and the above map will help you identify the new names of tools that...
Fri, 08/23/2019
The ALD has been moved this week! We replaced the back panel with a redesigned plate with improved port locations. Installation is...
Fri, 08/23/2019
The soft-litho room asher has been moved, installed, and tested - ready to go online on Monday. It's in Coral under (B12 / Soft-...
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