Fab Blog

Tue, 10/01/2019

The updated we used to post here now are going directly to MIT.nano's site (so that we're retiring this blog). You can check at   http://mitnano.mit.edu/facility-updates

Sat, 09/14/2019


The AJA sputter tool will be moved over to MIT.nano in about two weeks time. Work on the utilities has...

Fri, 09/13/2019


If you stand outside the 3rd floor cleanroom, you'll be looking through these windows.  Below, work is ongoing to install...

Fri, 09/13/2019


The AJA evaporator hook-up is nearing completion.  The...

Wed, 09/11/2019


Construction for the ALD has been completed, and it's been handed over to nano staff for startup and re-qualification over the...

Mon, 09/09/2019


In the chase, the NeoSEM's pump and exhaust are connected.

Thu, 09/05/2019


The table-top SEM was moved in and positioned, waiting for the pump and exhaust to be connected.

Sun, 08/25/2019


We are renaming tools as they move into MIT.nano, and the above map will help you identify the new names of tools that...

Fri, 08/23/2019


The EV620 (TRL EV1) mask aligner for the soft-lithography room has been moved, installed, tested, and is ready to go...

Fri, 08/23/2019


The ALD has been moved this week! We replaced the back panel with a redesigned plate with improved port locations. Installation is...