Fab Blog

ALD Moved this week!
Fri, 08/23/2019


The ALD has been moved this week! We replaced the back panel with a redesigned plate with improved port locations. Installation is...

CMP final install
Thu, 08/22/2019


The G&P CMP has been moved, and is being installed - awaiting the final exhaust connection next week before starting to test/...

SU8-Coater Getting Ready
Wed, 08/21/2019


Work is nearly complete on the SU8 coater bench in the soft-litho room. The SU8 coater will have plumbed 5um-thin SU8, as well...

Getting ready for next set of tools
Tue, 08/20/2019


The space is prepared to receive the next set of tools starting Sep 2. This rack will be where the Box Furnace is going...

More PCs arriving...
Mon, 08/19/2019


More PCs parts arrived to put together user work-terminals throughout the cleanroom.

CMP tool moved and being installed
Wed, 08/14/2019


The CMP (chemical mechanical polishing) tool has arrived after being moved from the 5th floor of 39, and is currently being plumbed to the...

Mask aligner moved and being installed
Tue, 08/13/2019


The first tools are starting to move. After disconnecting and protective wrapping, the wafer mask aligner was moved over to MIT.nano on...

Preparations for the RTA
Mon, 08/12/2019


The space is being prepared to receive the RTA (rapid thermal anneal) tool later in August. Electrical (the RTA tool has a 125...

Preparing for CMP install in the chase
Sat, 08/10/2019


The CMP (chemical mechanical polishing) tool infrastructure is almost ready. The CMP will be located in the return air path...

Rapid Transformation on Level 5
Mon, 08/05/2019


Monday morning, tools from the bldg 35 LEAP space were moved over and put into their positions on the 5th floor packaging bay...