Setting up the "metrology wall"

September 13, 2019


If you stand outside the 3rd floor cleanroom, you'll be looking through these windows.  Below, work is ongoing to install the metrology wall: a rail for power, data, nitrogen/air/vacuum where tables and table-top metrology instruments (e.g. for film thickness measurement) can be placed.  We put those tools along the wall, because they don't need a chase space, and because they are easily accessible from all bays in the cleanroom.