Inside level 3, looking south

July 1, 2019


A look down the long aisle of gas distribution boxes (VMBs). Process gas cylinders are in a special storage room, which houses all gas cylinders. The gas is routed to these distribution boxes, and from here, the process gases will be go to each of the tools. During the tool installation taking place now, the "last mile" of gas lines has to be placed (and, routing the lines up high, above water or other utilities that share the space, and around bends and corners, is not a trivial task). You can see this space from the public hallway on the 3rd floor, looking north!